The SuperZ MacroFlexure stage provides accuracy and repeatability in a low profile package that requires no lubrication. The stage has unparalleled straightness of travel for metrology and light mechanical processes. Linear encoders provide position feedback in resolutions to 10nm.
A voice-coil is the prime mover, making this an entirely non-contact system that will not generate particles, and is inherently vacuum compatible. Airpel® counterbalance cylinders are provided for atmospheric applications.
Geometric accuracy 1.0µm TIR (or better) at any point on stage (at 20°C)
Tip and Tilt throughout travel as low as 1 arc-sec TIR
Resolution as low as .01µm
Standard Travel of 10mm
Will operate horizontally
All structural parts are either nickel plated or stainless steel
Fully configurable with other Bell-Everman axes
Stage top plate easily configured to your specification
