Precision Cleanroom & Vacuum Compatible Stages & Actuators

Bell-Everman has extensive experience in the design and manufacture of vacuum-rated hardware. Our expertise derives directly from the semiconductor processing and aerospace mechanism industries.
We will design from scratch, use an existing product, or vacuum-prep any of our existing products to meet your low particle count cleanroom and vacuum chamber motion requirements.

We have developed stages and actuators for micron and sub-micron motion for use in a vacuum environment. We carefully select all materials and lubricants for low outgassing and can clean components and assemblies to the most rigorous standards. Our hardware has passed the ultra-stringent cleanliness requirements for the National Ignition Facility (NIF) located at Lawrence Livermore National Laboratory. We assemble and test all vacuum-prepped products in a low particle count environment. It is standard design practice to eliminate virtual leaks and minimize outgassing to allow our hardware to function at vacuum greater than 10e-7 torr.

 Benefits

  • Bell-Everman produces a variety of cleanroom and vacuum-rated stages and actuators. All of our products can be manufactured to be cleanroom compatible. Our capabilities go well beyond this, however, and vacuum-rated precision motion is one of our strengths.
  • Great attention to detail is taken in preparing our stages and actuators for vacuum applications. Fabricated parts are designed to completely avoid trapped volumes, machined using non-contaminating coolants, and assembled in a cleanroom. Vented hardware and vacuum-compatible lubricants and materials are standard.
  • All of our vacuum rated stages and actuators are fully tested prior to delivery, including environmental testing as needed to prove the suitability of the hardware for use in your application.
 

 Features

  • Stepped motion in increments as low as 50nm
  • Load capacity in excess of 600N in all directions
  • Vacuum compatible stepper and linear motors
  • Vacuum compatible lubricants (no dry lubricants used)
  • Virtual leaks eliminated from all hardware
  • Assembled and tested in a cleanroom
  • Complete installation and service manual
 

82 Aero Camino Rd.
Goleta, California 93117
Tel: 805/685.1029
Fax: 805/685.6787
© 2004 Bell-Everman, Inc.

© 2008 Bell-Everman, Inc.

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